JPS61145476A - 光学的距離測定装置 - Google Patents

光学的距離測定装置

Info

Publication number
JPS61145476A
JPS61145476A JP59266278A JP26627884A JPS61145476A JP S61145476 A JPS61145476 A JP S61145476A JP 59266278 A JP59266278 A JP 59266278A JP 26627884 A JP26627884 A JP 26627884A JP S61145476 A JPS61145476 A JP S61145476A
Authority
JP
Japan
Prior art keywords
light
optical fiber
delay time
light receiving
optical path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59266278A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0550710B2 (en]
Inventor
Yukio Sai
行雄 佐井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP59266278A priority Critical patent/JPS61145476A/ja
Publication of JPS61145476A publication Critical patent/JPS61145476A/ja
Publication of JPH0550710B2 publication Critical patent/JPH0550710B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Optical Radar Systems And Details Thereof (AREA)
JP59266278A 1984-12-19 1984-12-19 光学的距離測定装置 Granted JPS61145476A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59266278A JPS61145476A (ja) 1984-12-19 1984-12-19 光学的距離測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59266278A JPS61145476A (ja) 1984-12-19 1984-12-19 光学的距離測定装置

Publications (2)

Publication Number Publication Date
JPS61145476A true JPS61145476A (ja) 1986-07-03
JPH0550710B2 JPH0550710B2 (en]) 1993-07-29

Family

ID=17428736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59266278A Granted JPS61145476A (ja) 1984-12-19 1984-12-19 光学的距離測定装置

Country Status (1)

Country Link
JP (1) JPS61145476A (en])

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0325182U (en]) * 1989-07-20 1991-03-14
EP0603826A1 (en) * 1992-12-21 1994-06-29 Kabushiki Kaisha Topcon Optical distance meter
WO2007020856A1 (ja) * 2005-08-17 2007-02-22 Hitachi, Ltd. 変位計測方法及びその装置、ステージ装置並びにプローブ顕微鏡
JP2007127541A (ja) * 2005-11-04 2007-05-24 Sokkia Co Ltd 光波距離計
WO2013084616A1 (ja) * 2011-12-05 2013-06-13 株式会社日立製作所 距離計測方法および装置とそれを搭載した形状計測装置

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0325182U (en]) * 1989-07-20 1991-03-14
EP0603826A1 (en) * 1992-12-21 1994-06-29 Kabushiki Kaisha Topcon Optical distance meter
WO2007020856A1 (ja) * 2005-08-17 2007-02-22 Hitachi, Ltd. 変位計測方法及びその装置、ステージ装置並びにプローブ顕微鏡
JP2007051900A (ja) * 2005-08-17 2007-03-01 Hitachi Ltd 変位計測方法及びその装置、ステージ装置並びにプローブ顕微鏡
US20090210971A1 (en) * 2005-08-17 2009-08-20 Toshihiko Nakata Displacement Measurement Method and Apparatus Thereof, Stage Apparatus, and Probe Microscope
US8284406B2 (en) 2005-08-17 2012-10-09 Hitachi, Ltd. Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope
US20120327429A1 (en) * 2005-08-17 2012-12-27 Toshihiko Nakata Displacement Measurement Method and Apparatus Thereof, Stage Apparatus, and Probe Microscope
US8629985B2 (en) 2005-08-17 2014-01-14 Hitachi, Ltd. Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope
JP2007127541A (ja) * 2005-11-04 2007-05-24 Sokkia Co Ltd 光波距離計
WO2013084616A1 (ja) * 2011-12-05 2013-06-13 株式会社日立製作所 距離計測方法および装置とそれを搭載した形状計測装置

Also Published As

Publication number Publication date
JPH0550710B2 (en]) 1993-07-29

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